ATMF-C Gas Mass Flow Controller

Measuring medium: Various clean gases

Measuring range: Micro flow

Accuracy Degree: ±0.5%，±1.0%

Output signal: 4-20mA, pulse (optional)

Mass Flow Controller (MFC) used to accurately measure and control the mass flow of gas. They play an important role in scientific research and production in various fields such as semiconductors and integrated circuit industries, special materials disciplines, chemical industry, and industrial, pharmaceutical, environmental protection, and vacuum lamps. Typical applications include: electronic process equipment such as diffusion, epitaxy, CVD, oxidation, plasma etching, sputtering, and ion implantation; and coating equipment, optical fiber smelting, microreaction devices, mixed gas distribution systems, capillary measurement, Gas chromatographs and other analytical instruments

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Introduction Features Specifications Model Selection Application Installation

Service Hotline：

＋86 021-31598212

Introduction

The excellent accuracy, robustness and reliability of the AT series gas mass flow controllers stem from our unique sensor probes. The sealed probe consists of two sensing elements - speed sensor and temperature sensor, which can automatically correct the influence caused by the change of temperature and pressure. The meter circuit heats the speed sensor to a constant value higher than the gas temperature, and then measures the cooling effect of the gas flow. The flow is calculated under the principle that measuring electric power consumed which used to maintain a constant temperature difference, which is proportional to the mass flow of the gas. Both sensors are standard platinum resistance temperature detectors (RTD). Platinum RTD wire is wrapped around a solid ceramic core, firm and reliable. The entire sensor is sealed in a 316 stainless steel packing case.

Features

The microelectromechanical system (MEMS) flow sensing chip is adopted, and the sensor has the characteristics of high precision, high sensitivity and strong anti-interference.

This product has a display screen and setting buttons for easy operation and direct reading.

The zero point stability of the sensor is greatly improved than that of ordinary thermal flowmeters.

Full range high stability.

Full range precision and excellent repeatability.

Combined with structural optimization, the pressure loss of the flowmeter is greatly reduced and the energy consumption is reduced compared with the traditional mechanical instrument

LCD display instantaneous flow and cumulative flow, clear and intuitive, easy to read.

Optional 4~20mA standard current signal output and second impulse output.

Specifications

Performance	Technical parameter
Flow range	(0~5,10,20,30,50,100,200,300,500...)SCCM (0~1,2,3,5,10,50,100,200,500...) SLM
Accuracy	±1%F.S ±0.5%F.S
Linearity	±0.5~1.5%F.S
Repeatability	±0.2%F.S
Responding time	Electrical characteristics:10sec gas characteristics : (1~4)sec
Differential pressure range	0.1~0.5MPa
Max pressure	3MPa
Working temperature	0~70ºC
Digital value	RS485 MODBUS
Analog value	DC 0~5V ,4~20mA
Power supply	DC +15V/24V,flow meter<400mA,flow controller< 600mA
Electrical connection	DB15
Leakage rate	1×10-8SCCSHe
Material of base	316L Stainless steel
Seal material	FKM,nitrile butadiene rubber,chloroprene rubber
Glad hand	Φ3,Φ6,Φ10,1/8",1/4",3/8"

Model Selection

01 Measure the medium, temperature, whether there is corrosion

02 Flow range and inside diameter of user pipe

03 Classification of process

04 Whether to local display

05 Working power supply

06 Signal output, communication

07 Whether to explosion-proof

08 Installation mode

09 Precision class

Application

Industrial process

Energy measurement

Environmental protection engineering

Transportation

Biotechnology

Scientific experiment

Marine meteorology

Rivers and lakes

Installation

CX Dimensions of mass flow controller

when installing the splice, after installing the front ferrule, back ferrule, and nut, tighten the nut and the splice by hand, then tighten with a wrench (The imported Swagelok splice requires a 1.25-turn wrench to tighten.) to ensure air tightness. Note that double wrench should be used, with one wrench stuck in the joint and the other to turn the nut. Especially when removing the nozzle, double wrench must be used, otherwise it will cause loosening of the joint and affect the sealing.

Installation Position

The controller is best installed to maintain the level of the installation surface, but not particularly sensitive to the location, can be installed at any position, if the zero offset is found when installing in non-horizontal position, you can adjust the zero point after work.

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